Displaying items by tag: optical and EUV lithography

Opportunities of polarization-resolved EUV scatterometry on photomasks

Published in 2023
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Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions

Published in 2023
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Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation

Published in 2023
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Pushing the boundaries of EUV scatterometry reconstruction of complex nanostructures for next-generation transistor technology

Published in 2023
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Challenges of Grazing Emission X-ray Fluorescence GEXRF for the Characterization of Advanced Nanostructured Surfaces

Published in 2022
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Latent Image Characterization by Spectroscopic Reflectometry in the Extreme Ultraviolet

Published in 2022
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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Published in 2018
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Investigating surface structures by EUV scattering

Published in 2017
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Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Published in 2017
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FEM for validation of alternative scattering computation method

Published in 2017
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Modeling of Optical Imaging of Finite Multi-Line Arrays

Published in 2016
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Quantitative optical imaging for in-die-capable critical dimension targets

Published in 2016
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Efficient Bayesian inversion for shape reconstruction of lithography masks

Published in 2010
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Benchmark of rigorous methods for electromagnetic field simulation with application to lithography simulations

Published in 2008
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Benchmark of computational methods for mask simulation in optical lithography

Published in 2005
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Benchmark of Global Optimization Approaches for Nano-optical Shape Optimization and Parameter Reconstruction

Published in 2019
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Gaussian process regression for efficient parameter reconstruction

Published in 2019
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EUV mask feature reconstruction via phase retrieval

Published in 2019
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Grazing incidence x-ray fluorescence based profile reconstruction

Published in 2019
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